SCA103T PDF даташит
Спецификация SCA103T изготовлена «Murata» и имеет функцию, называемую «DIFFERENTIAL INCLINOMETER». |
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Детали детали
Номер произв | SCA103T |
Описание | DIFFERENTIAL INCLINOMETER |
Производители | Murata |
логотип |
17 Pages
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Data Sheet
SCA103T Series
THE SCA103T DIFFERENTIAL INCLINOMETER SERIES
The SCA103T Series is a 3D-MEMS-based single axis inclinometer family that uses the differential measurement
principle. The high calibration accuracy combines extremely low temperature dependency, high resolution and low
noise together with a robust sensing element design, to make the SCA103T an ideal choice for high accuracy
leveling instruments. The Murata inclinometers are insensitive to vibration due to having over damped sensing
elements plus they can withstand mechanical shocks of 20000 g.
Features
Measuring ranges ±15° SCA103T-D04 and
± 30° SCA103T-D05
0.001° resolution (10 Hz BW, analog output)
Sensing element controlled over damped
frequency response (-3dB 18Hz)
Robust design, high shock durability (20000g)
Excellent stability over temperature and time
Common mode error and noise reduction
using the differential measurement principle
Single +5 V supply
Applications
Platform leveling and stabilization
Rotating laser levels
Ratiometric analog voltage outputs
Digital SPI inclination and temperature output
Comprehensive failure detection features
o True self test by deflecting the sensing
elements’ proof mass by electrostatic force.
o Continuous sensing element interconnection
failure check.
o Continuous memory parity check.
RoHS compliant
Compatible with Pb-free reflow solder process
Leveling instruments
Construction levels
12 VDD
S ens i ng
element 1
Signal conditioning
and filtering
10 ST_1
9 ST_2
Self test 1
Self test 2
E E P RO M
calibration
memory
Temperature
Sensor
S ens i ng
element 2
Signal conditioning
and filtering
A/D conversion
SPI interface
11 OUT_1
1 SCK
3 MISO
4 MOSI
7 CSB
5 OUT_2
Figure 1.
Functional block diagram
6 GND
Murata Electronics Oy
www.muratamems.fi
Subject to changes
Doc.Nr. 8261700
1/17
Rev.A3
Free Datasheet http://www.datasheet4u.com/
No Preview Available ! |
SCA103T Series
TABLE OF CONTENTS
The SCA103T Differential Inclinometer Series .......................................................................1
Features............................................................................................................................................. 1
Applications ...................................................................................................................................... 1
Table of Contents......................................................................................................................2
1 Electrical Specifications .....................................................................................................3
1.1 Absolute Maximum Ratings ................................................................................................... 3
1.2 Performance Characteristics.................................................................................................. 3
1.3 Electrical Characteristics ....................................................................................................... 4
1.4 SPI Interface DC Characteristics............................................................................................ 4
1.5 SPI Interface AC Characteristics............................................................................................ 4
1.6 SPI Interface Timing Specifications....................................................................................... 5
1.7 Electrical Connection.............................................................................................................. 6
1.8 Typical Performance Characteristics .................................................................................... 6
1.8.1 Additional External Compensation ...................................................................................... 7
2 Functional Description .......................................................................................................8
2.1 Differential Measurement ....................................................................................................... 8
2.2 Voltage to Angle Conversion ................................................................................................. 9
2.3 Ratiometric Output................................................................................................................ 10
2.4 SPI Serial Interface................................................................................................................ 10
2.5 Digital Output to Angle Conversion..................................................................................... 12
2.6 Self Test and Failure Detection Modes ................................................................................ 13
2.7 Temperature Measurement .................................................................................................. 14
3 Application Information ....................................................................................................15
3.1 Recommended Circuit Diagrams and Printed Circuit Board Layouts ............................... 15
3.2 Recommended Printed Circuit Board Footprint ................................................................. 16
4 Mechanical Specifications and Reflow Soldering ..........................................................16
4.1 Mechanical Specifications (Reference only) ....................................................................... 16
4.2 Reflow Soldering................................................................................................................... 17
Murata Electronics Oy
www.muratamems.fi
Subject to changes
Doc.Nr. 8261700
2/17
Rev.A3
Free Datasheet http://www.datasheet4u.com/
No Preview Available ! |
SCA103T Series
1 Electrical Specifications
The SCA103T product family consists of two versions, the SCA103T-D04 and the SCA103T-D05,
that differ in measurement range. The specific performance specifications related to each version
are listed in the table “SCA103T performance characteristics” below. All other specifications are
common to both versions.
The supply voltage is Vdd=5.00V and ambient temperature unless otherwise specified. Parameters
marked as D are valid when measured in differential mode using an external differential amplifier.
Parameters marked with S are for a single measurement channel. The performance of the selected
amplifier may have an effect on some parameters. The differential signal is determined as Out_diff
= Out1 – Out2.
1.1 Absolute Maximum Ratings
Supply voltage (VDD)
Voltage at input / output pins
Storage temperature
Operating temperature
Mechanical shock
-0.3 V to +5.5V
-0.3V to (VDD + 0.3V)
-55°C to +125°C
-40°C to +125°C
Drop from 1 meter onto a concrete surface
(20000g). Powered or non-powered
1.2 Performance Characteristics
Parameter
D/S Condition
SCA103T SCA103T
-D04
-D05
Measuring range
D Nominal
±15 ±30
Frequency response
S –3dB LP (1
±0.26
8-28
±0.5
8-28
Offset (Output at 0g)
Offset calibration error
S Ratiometric output
S
Vdd/2
±0.057
Vdd/2
±0.11
Offset Digital Output
S
1024
1024
Sensitivity
D 16 8
between 0…1° (2 280 140
Sensitivity calibration error S
±0.5 ±0.5
Sensitivity Digital Output
Offset temperature
dependency
D 6554
D -25…85°C (typical) ±0.002
-40…125°C (max)
±0.29
3277
±0.002
±0.29
Sensitivity temperature
dependency
D -25...85°C (typical)
±0.013
±0.013
-40…125°C (max) -2.5...+1 -2.5...+1
Typical non-linearity
D Measuring range
±0.057
±0.11
Digital output resolution
D
between 0…1° (2
12
0.009
12
0.017
Output noise density
D From DC...100Hz
0.0004
0.0004
Analog output resolution
D Bandwidth 10 Hz (3 0.0013
0.0013
Cross-axis sensitivity
S Max.
44
Ratiometric error
S Vdd = 4.75...5.25V
±1
±1
Note 1. The frequency response is determined by the sensing element’s internal gas damping.
Note 2. The angle output has SIN curve relationship to voltage output - refer to chapter 2.2
Note 3. Resolution = Noise density * √(bandwidth)
Units
°
g
Hz
V
°
LSB
V/g
mV/°
%
LSB / g
°/°C
°
%/°C
%
°
Bits
° / LSB
/ Hz
°
%
%
Murata Electronics Oy
www.muratamems.fi
Subject to changes
Doc.Nr. 8261700
3/17
Rev.A3
Free Datasheet http://www.datasheet4u.com/
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